Wafer

NPW – Features

  • Track all movements of NPWs (Non Productive Wafers) in histories.
  • Centralized Business Rules for NPWs.
  • Integration with MES/CIM and WIP dispatcher / scheduler.
  • Rather than in MES, NPWs workflows and status models can be changed quickly and easily.
  • Ensure right non productive wafer on right location.
  • “Smart qual strategy management” for NPW inspections and cleaning cycles.
  • Fast recipe management optimizes inspection time and quality.
  • Stocker and shelf integration to enable homogeneous operation.
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