RTCL – Reticle Management

RTCL – Features

• Best result of haze control and crystal growth control for reticles of any kind.
• “Smart qual strategy management” triggers inspection and cleaning cycles ahead of time.
• Reliable recipe selection prevents reticle damage on inspection tools.
• Fast recipe management optimizes inspection time and quality.
• Track all reticle movements in histories and ensure no more lost reticles.
• Enable users to prepare for coming WIP ahead of time.
• Integration with MES/CIM and WIP dispatcher / scheduler.
• Integration of all major mask houses to simplify the overview of your orders.
• Centralized Business Rules for Reticles.
• Workflows and status models can be changed quickly and easily.
• Stocker integration to enable homogeneous operation.
• Ready to use, field proven turnkey solution.