November 2014
iCADA's new reticle inspection management system (INSP)
iCADA's new Reticle Inspection Management System “INSP” has taken the step into production at a major semiconductor fab in Europe. INSP enables reticle engineers to review defect maps with defect images from the inspection equipment, to compare, analyze and classify defects, and to find new defects within the entire reticle inspection and defect history from iCADA's reticle management system RTCL.